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Authors: Mario Nitzsche, Peter Duerr, Andreas Neudert
Journal title: SPIE Photonics West 2023
Journal number: Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340R (2023)
Journal publisher: SPIE digital library
Published year: 2023
DOI identifier: 10.1117/12.2649743
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