FEM Simulations to optimize a micro mirror array package for a wide operating temperature range

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Authors: Sreevidya Guru, Peter Duerr, Alexander Mai

Journal title: SPIE Photonics West 2023

Journal number: Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340S (2023)

Journal publisher: SPIE digital library

Published year: 2023

DOI identifier: 10.1117/12.2647680