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Authors: Girolamo Mincuzzi; Alexandra Bourtereau; Aurélien Sikora; Marc Faucon; Rainer Kling
Journal title: Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVI
Journal number: 1
Journal publisher: SPIE
Published year: 2022
DOI identifier: 10.1117/12.2607591