Pushing laser nano-structuring through mass production

Summary

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Authors: Girolamo Mincuzzi; Alexandra Bourtereau; Aurélien Sikora; Marc Faucon; Rainer Kling

Journal title: Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVI

Journal number: 1

Journal publisher: SPIE

Published year: 2022

DOI identifier: 10.1117/12.2607591