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Authors: Aurelien Sikora; Marc Faucon; Laura Gemini; Rainer Kling; Girolamo Mincuzzi
Journal title: Proc. SPIE 11989, Laser-based Micro- and Nanoprocessing XVI, 119890R (4 March 2022)
Journal number: 1
Journal publisher: SPIE
Published year: 2022
DOI identifier: 10.1117/12.2607707
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