Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: Steffen Günther, Elisa Kutschke, Andreas Bork
Journal title: Vakuum in Forschung und Praxis
Journal number: 34, nr4
Journal publisher: John Wiley & Sons Ltd.
Published year: 2022
Published pages: 26-30
ISSN: 0947-076X
Search
Organisations
- Not specified