In situ phosphorus-doped polycrystalline silicon films by low pressure chemical vapor deposition for contact passivation of silicon solar cells

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Authors: Meriç Fırat; Hariharsudan Sivaramakrishnan Radhakrishnan; Maria Recaman Payo; Filip Duerinckx; Loic Tous; Jef Poortmans

Journal title: Solar Energy

Journal number: Vol 231

Journal publisher: Elsevier

Published year: 2022

Published pages: 78-87

DOI identifier: 10.1016/j.solener.2021.11.045

ISSN: 0160-8371