Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

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Authors: Meriç Fırat; Lennaert Wouters; Pieter Lagrain; Felix Haase; Jana-Isabelle Polzin; Aditya Chaudhary; Gizem Nogay; Thibaut Desrues; Jan Krügener; Robby Peibst; Loic Tous; Hariharsudan Sivaramakrishnan Radhakrishnan; Jef Poortmans

Journal title: ACS Applied Materials and Interfaces

Journal number: 2022, 14, 15, 17975–17986

Journal publisher: American Chemical Society

Published year: 2022

DOI identifier: 10.1021/acsami.2c01801

ISSN: 1944-8244