Benchmarking experiment of substrate quality including SmartSiCTM wafers by epitaxy in a batch reactor

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Authors: B. Kallinger, P. Hens, P. Berwian, C. Kranert, K.M. Albrecht, J. Erlekampf

Journal title: Solid State Phenomena,

Journal number: Volume 342

Journal publisher: Trans Tech Publications Ltd

Published year: 2022

Published pages: 91-98

DOI identifier: 10.4028/v-868lqn

ISSN: 1662-9779