Imaging performance of low-n absorbers at the optical resolution limits of high NA EUV systems

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Authors: A. Erdmann, H. Mesilhy, P. Evanschitzky, G. Bottiglieri, T. Brunner, E. van Setten, C. van Lare, M- van de Kerkhof

Journal title: Photomask Japan

Journal publisher: Photomask Japan

Published year: 2023