Enabling the next step for on-product performance with High NA EUV system

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Authors: Kaustuve Bhattacharyya, Diederik de Bruin, Rudy Peeters, Jara Garcia Santaclara, Herman Heijmerikx, Rob van Ballegoij, Eelco van Setten, Jan van Schoot, Sjoerd Lok, Greet Storms, Peter Vanoppen

Journal title: EUVL Conference 2023

Journal publisher: SPIE

Published year: 2023