Physical modeling of HZO-based ferroelectric field-effect transistors with a WOx channel

Summary

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Authors: Wen, Xin; Halter, Mattia; Bégon-Lours, Laura; Luisier, Mathieu

Journal title: Frontiers in Nanotechnology

Journal publisher: Frontiers Media

Published year: 2023

DOI identifier: 10.3929/ethz-b-000594774

ISSN: 2673-3013