The Role of Defects and Interface Degradation on Ferroelectric HZO Capacitors Aging

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Authors: Lorenzo Benatti, Sara Vecchi, Milan Pesic, Francesco Maria Puglisi

Journal title: IEEE International Reliability Physics Symposium (IRPS) 2023

Journal publisher: IEEE

Published year: 2023

DOI identifier: 10.1109/irps48203.2023.10118229