Scaling ferroelectric HZO thickness for low power Ge MFS-FTJ memories

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Authors: Nikitas Siannas, Christina Zacharaki, Polychronis Tsipas, Stefanos Chaitoglou, Laura Begon-Lours, Athanasios Dimoulas

Journal title: IEEE European Solid-State Device Research Conference (ESSDERC) 2021

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/essderc53440.2021.9631382