Reduced fatigue and leakage of ferroelectric TiN/Hf_0.5Zr_0.5O₂/TiN capacitors by thin alumina interlayers at the top or bottom interface

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Authors: H Alex Hsain; Younghwan Lee; Suzanne Lancaster; Patrick D Lomenzo; Bohan Xu; Thomas Mikolajick; Uwe Schroeder; Gregory N Parsons; Jacob L Jones

Journal title: Nanotechnology

Journal publisher: Institute of Physics Publishing

Published year: 2023

DOI identifier: 10.1088/1361-6528/acad0a

ISSN: 0957-4484