Operation and Design of Ferroelectric FETs for a BEOL Compatible Device Implementation

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Authors: Daniel Lizzit; David Esseni

Journal title: ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/essderc53440.2021.9631764