Summary
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Authors: Harold LE TULZO, Loriana CELESTE, Inès TENDERO, Jaber DERAKHSHANDEH, Carine GERETS, Candice THOMAS, Jean CHARBONNIER, Edouard DESCHASEAUX, Thierry LAZERAND, Jérôme DAVIOT
Journal title: Microelectronic Engineering
Journal number: 276
Journal publisher: Elsevier BV
Published year: 2023
Published pages: 112010
DOI identifier: 10.1016/j.mee.2023.112010
ISSN: 0167-9317
