Impact of hydrogen coverage on silane adsorption during Si epitaxy from ab initio simulations

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Authors: L. Treps, J. Li, B. Sklénard

Journal title: Solid-State Electronics

Journal number: 197

Journal publisher: Pergamon Press Ltd.

Published year: 2022

Published pages: 108441

DOI identifier: 10.1016/j.sse.2022.108441

ISSN: 0038-1101