Multiscale atomistic modelling of CVD: From gas-phase reactions to lattice defects

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Authors: D. Raciti, G. Calogero, D. Ricciarelli, R. Anzalone, G. Morale, D. Murabito, I. Deretzis, G. Fisicaro, A. La Magna

Journal title: Mater. Sci. Semicond. Proc.

Journal number: 167

Journal publisher: Pergamon Press

Published year: 2023

Published pages: 107792

DOI identifier: 10.1016/j.mssp.2023.107792

ISSN: 1369-8001