Engineering of dense arrays of vertical Si1-xGex nanostructures

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Authors: J. Müller, A. Lecestre, R. Demoulin, F. Cristiano, J.-M. Hartmann, G. Larrieu

Journal title: Nanotechnology

Journal number: 34

Journal publisher: IOP Publ.

Published year: 2023

Published pages: 105303

DOI identifier: 10.1088/1361-6528/aca419

ISSN: 1361-6528