Dynamic modeling of Si(100) thermal oxidation: Oxidation mechanisms and realistic amorphous interface generation

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: L. Cvitkovich, D. Waldhör, A.-M. El-Sayed, M. Jech, C. Wilhelmer, T. Grasser

Journal title: Appl. Surf. Sci.

Journal number: 610

Journal publisher: Elsevier BV

Published year: 2023

Published pages: 155378

DOI identifier: 10.1016/j.apsusc.2022.155378

ISSN: 0169-4332