Atomistic Insights into Ultrafast SiGe Nanoprocessing

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Authors: G. Calogero, D. Raciti, D. Ricciarelli, P. Acosta-Alba, F. Cristiano, R. Daubriac, R. Demoulin, I. Deretzis, G. Fisicaro, J.-M. Hartmann, S. Kerdilès, A. La Magna

Journal title: J. Phys. Chem. C

Journal publisher: American Chemical Society

Published year: 2023

DOI identifier: 10.1021/acs.jpcc.3c05999

ISSN: 1932-7455