Secondary ion mass spectrometry quantification of boron distribution in an array of silicon nanowires

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Authors: Paweł Piotr Michałowski; Jonas Müller; Chiara Rossi; Alexander Burenkov; Eberhard Bär; Guilhem Larrieu; Peter Pichler

Journal title: Measurement

Journal number: 211

Journal publisher: Elsevier BV

Published year: 2023

Published pages: 112630

DOI identifier: 10.1016/j.measurement.2023.112630

ISSN: 0263-2241