On Continuum Simulations of the Evolution of Faulted and Perfect Dislocation Loops in Silicon during Post-Implantation Annealing

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Authors: Anna Johnsson

Journal title: MRS Advances

Journal number: 7

Journal publisher: Springer Nature Switzerland AG

Published year: 2022

Published pages: 1315-1320

DOI identifier: 10.1557/s43580-022-00424-x

ISSN: 2059-8521