Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Julliard, P.L.; Johnsson, A.; Zographos, N.; Demoulin, R.; Monflier, Richard; Jay, A.; Er-Riyahi, O.; Monsieur, F.; Joblot, S.; Deprat, F.; Rideau, D.; Pichler, P.; Hémeryck, Anne; Cristiano, Fuccio

Journal title: Solid-State Electronics

Journal number: 200

Journal publisher: Pergamon Press Ltd.

Published year: 2023

Published pages: 108521

DOI identifier: 10.1016/j.sse.2022.108521

ISSN: 0038-1101