Kinetic Monte Carlo for Process Simulation: First Principles Calibrated Parameters for BO 2

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Authors: Pierre-Louis Julliard; Antoine Jay; Miha Gunde; Nicolas Salles; Frederic Monsieur; Nicolas Guitard; Thomas Cabout; Sylvain Joblot; Layla Martin-Samos; Denis Rideau; Fuccio Cristiano; Anne Hémeryck

Journal title: 2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

Journal publisher: IEEE

Published year: 2021

Published pages: 219-223

DOI identifier: 10.1109/sispad54002.2021.9592580

ISBN: 9781665406864