Advanced Contacts on 3D Nanostructured Channels for Vertical Transport Gate-all-around Transistors

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Authors: G. Larrieu, J. Müller, S. Pelloquin, A. Kumar, K. Moustakas, P. Michałowski, A. Lecestre

Journal title: 21st International Workshop on Junction Technology (IWJT)

Journal publisher: IEEE

Published year: 2023

DOI identifier: 10.23919/iwjt59028.2023.10175172