Verification of performance of XRR and HSI as quality control in industrial R2R vacuum coating

Set of surface images of a roll 100 m x 06 m showing for each layer in a 3 layer stack the layer thickness and its deviation with accuracy of 1 nm after R2R processing at 2 mmin The demo systems at FEP are operational and a quality assessment and XRR calibration procedure has been established for vacuum coated samples with previously unknown properties The characterisation results for selected samples will be made available to the public as Case Study White Paperopen access scientific publication to advertise the NanoQI solution Task 63