Verification of performance of HSI in evaluation of ALD coatings: Detection of deviations ≥ 1 monolayer in < 30 seconds on 15 x 15 cm² sample area; detection of changes in residual carbon through > 2% change in electron density.

The inline HSI is operational and has been used to successfully characterise ultrathin ALD layer samples with previously unknown properties The characterisation results for selected samples will be made available to the public as CaseStudy WhitePaperopen access scientific publication to advertise the NanoQI solution Task 62