ENERGY-EFFICIENT SEMICONDUCTOR MANUFACTURING: ESTABLISHING AN ECOLOGICAL OPERATING CURVE

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Authors: A. Hopf, D. Schneider, I. Abdelgafar, H. Ehm, G. Reinhart

Journal title: Proceedings of the 2022 Winter Simulation Conference

Journal number: every year

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/wsc57314.2022.10015333

ISBN: 978-1-6654-7661-4

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