Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Weis, Thor August Schimmell; Lahijani, Babak Vosoughi; Tsoukalas, Konstantinos; Albrechtsen, Marcus; Stobbe, Søren

Journal title: Arxiv

Journal publisher: Cornell University

Published year: 2023

DOI identifier: 10.48550/arxiv.2307.01122

ISSN: 2331-8422