A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits

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Authors: P. Edinger, A.Y. Takabayashi, C. Antony, P. Verheyen, U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason

Journal title: Integrated Photonics Research

Journal number: ITu1A.2

Journal publisher: Optica Publishing Group

Published year: 2023

DOI identifier: 10.1364/IPRSN.2023.ITu1A.2

ISBN: 978-1-957171-26-5