Integrated 4-terminal Single-Contact Nanoelectromechanical Relays Implemented in a Silicon-On-Insulator Foundry Process

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Authors: Y. Li, E. Worsey, S. Bleiker, P. Edinger, M. Kulsreshath, Q. Tang, A.Y. Takabayashi, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason, D. Pamunuwa, F. Niklaus

Journal title: Nanoscale

Journal number: 15, 17335-17341

Journal publisher: RCS Publishing

Published year: 2023

DOI identifier: 10.1039/D3NR03429A

ISSN: 2040-3372