Direct‐Patterning ZnO Deposition by Atomic‐Layer Additive Manufacturing Using a Safe and Economical Precursor

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Authors: Sonja Stefanovic; Negar Gheshlaghi; David Zanders; Ivan Kundrata; Baolin Zhao; Maïssa K. S. Barr; Marcus Halik; Anjana Devi; Julien Bachmann

Journal title: Small

Journal number: 19

Journal publisher: Wiley

Published year: 2023

DOI identifier: 10.1002/smll.202301774

ISSN: 1613-6829