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Authors: Oscar Malvar, Eduardo Gil-Santos, Jose J Ruz, Elena Sentre-Arribas, Adrián Sanz-Jiménez, Priscila M Kosaka, Sergio García-López, Álvaro San Paulo, Samantha Sbarra, Louis Waquier, Ivan Favero, Maurits Van Der Heiden, Robert K Altmann, Dimitris Papanastasiou, Diamantis Kounadis, Ilias Panagiotopoulos, Jesús Mingorance, María Rodríguez-Tejedor, Rafael Delgado, Montserrat Calleja, Javier Tamay
Journal title: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Journal number: 15-19 January 2023
Journal publisher: IEEE
Published year: 2023
DOI identifier: 10.1109/mems49605.2023.10052311
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