Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

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Authors: Pierre Edinger, Gaehun Jo, Chris Phong Van Nguyen, Alain Yuji Takabayashi, Carlos Errando-Herranz, Cleitus Antony, Giuseppe Talli, Peter Verheyen, Umar Khan, Simon J. Bleiker, Wim Bogaerts, Niels Quack, Frank Niklaus, and Kristinn B. Gylfason

Journal title: Opt. Express

Journal publisher: Optical Society of America

Published year: 2023

DOI identifier: 10.1364/oe.480219

ISSN: 1094-4087