Silver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

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Authors: Tim Hasselmann; Bujamin Misimi; Nils Boysen; David Zanders; Jan‐Lucas Wree; Detlef Rogalla; Tobias Haeger; Florian Zimmermann; Kai Oliver Brinkmann; Sebastian Schädler; Detlef Theirich; Ralf Heiderhoff; Anjana Devi; Thomas Riedl

Journal title: Adv. Mater. Technol.

Journal number: 8, 2023

Journal publisher: Wiley-VCH Gmb

Published year: 2023

Published pages: 2200796

DOI identifier: 10.1002/admt.202200796

ISSN: 2365-709X