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Authors: Johan Eriksen, Julien Schira, Nadine Vincent, Celine Sabatel, Anders Kristensen, Rodolphe Marie
Journal title: Microelectronic Engineering
Journal number: 187-188
Journal publisher: Elsevier BV
Published year: 2018
Published pages: 14-20
DOI identifier: 10.1016/j.mee.2017.11.011
ISSN: 0167-9317