EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

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Authors: Ombeline de La Rochefoucauld, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, Philippe Zeitoun

Journal title: Sensors

Journal number: 21/3

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2021

Published pages: 874

DOI identifier: 10.3390/s21030874

ISSN: 1424-8220