Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography

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Authors: MinHee Kwon, Koan Ignat, Daniel Platz, Holger Arthaber, Ulrich Schmid

Journal title: Sensors and Actuators A: physical

Journal publisher: Elsevier BV

Published year: 2023

DOI identifier: 10.1016/j.sna.2023.114637

ISSN: 0924-4247