AlN Ultra-Thin Chips Based Flexible Piezoelectric Tactile Sensors

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Authors: Yogeenth Kumaresan, Sihang Ma, Dhayalan Shakthivel, Ravinder Dahiya

Journal title: 2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)

Journal publisher: IEEE

Published year: 2021

Published pages: 1-4

DOI identifier: 10.1109/fleps51544.2021.9469763

ISBN: 978-1-7281-9173-7