Periodic Reporting for period 2 - OXiNEMS (Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields)

OXiNEMS targets the development of nanoelectromechanical systems (NEMS) devices fully made of (crystalline) transition metal oxides. Today’s Microelectromechanical Systems (MEMS) and NEMS mainly rely on silicon-related processes and technology, but future M/NEMS will need to...