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Resource
OXiNEMS-791856
ETCH
Summary
Etching protocols for selected materials established
More information & hyperlinks
Web resources:
https://ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5e1fd0274&appId=PPGMS
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Associated projects
OXiNEMS - Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields
Organisations
Not specified