The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO 3 (100), SrTiO 3 (110), and SrTiO 3 (111) substrates

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Authors: Alejandro Enrique Plaza, Nicola Manca, Cristina Bernini, Daniele Marré, Luca Pellegrino

Journal title: Applied Physics Letters

Journal number: 119/3

Journal publisher: American Institute of Physics

Published year: 2021

Published pages: 033504

DOI identifier: 10.1063/5.0056524

ISSN: 0003-6951