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Authors: Federico Maspero, Gabriele Gatani, Simone Cuccurullo, Riccardo Bertacco
Journal title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2021
Published pages: 374-377
DOI identifier: 10.1109/mems51782.2021.9375441
ISBN: 978-1-6654-1912-3
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