Thermo-optic coefficient of PECVD silicon-rich silicon nitride

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Authors: Natale G. Pruiti, Charalambos Klitis, Christopher Gough, Stuart May, and Marc Sorel

Journal title: Optics Letters

Journal number: 45, 22

Journal publisher: Optica Publishing Group

Published year: 2020

Published pages: 6242-6245

DOI identifier: 10.1364/ol.403357

ISSN: 0000-0000