Optical properties of silicon-rich silicon nitride for photonic integrated circuits

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Authors: N. G. Pruiti, C. Gough, S. May, and M. Sorel

Journal title: Conference on Lasers and Electro-Optics

Journal number: Technical Digest Series

Journal publisher: Optica Publishing Group

Published year: 2022

DOI identifier: 10.1364/cleo_si.2022.sf3o.2