Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research

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Authors: Mario Baum, Christoph Meinecke, Thomas Blaudeck, Christian Helke, Danny Reuter, Karla Hiller, Sascha Hermann, Stefan E. Schulz, and Harald Kuhn

Journal title: Journal of Vacuum Science & Technology B

Journal number: 39

Journal publisher: A V S AMER INST PHYSICS

Published year: 2021

Published pages: 062805

DOI identifier: 10.1116/6.0001299

ISSN: 2166-2746