Approach to combine electron-beam lithography and two-photon polymerization for enhanced nano-channels in network-based biocomputation devices

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Authors: G. Heldt, Ch. Meinecke, S. Steenhusen, T. Korten, M. Groß, G. Domann, F. Lindberg, D. Reuter, St. Diez, H. Linke, St. E. Schulz

Journal title: Proceedings Volume 10775, 34th European Mask and Lithography Conference

Journal number: Vol. 10775

Journal publisher: SPIE-INT SOC OPTICAL ENGINEERING

Published year: 2018

Published pages: 1077517

DOI identifier: 10.1117/12.2326598

ISSN: 1996-756X