Ultrashort Pulse Laser Lift-Off Processing of InGaN/GaN Light-Emitting Diode Chips

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Authors: Nursidik Yulianto*, Grandprix T. M. Kadja, Steffen Bornemann, Soniya Gahlawat, Nurhalis Majid, Kuwat Triyana, Fatwa F. Abdi, Hutomo Suryo Wasisto*, and Andreas Waag

Journal title: ACS Applied Electronic Materials

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 778-788

DOI identifier: 10.1021/acsaelm.0c00913

ISSN: 2637-6113