Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique

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Authors: Nursidik Yulianto, Andam Deatama Refino, Alina Syring, Nurhalis Majid, Shinta Mariana, Patrick Schnell, Ruri Agung Wahyuono, Kuwat Triyana, Florian Meierhofer, Winfried Daum, Fatwa F. Abdi, Tobias Voss, Hutomo Suryo Wasisto & Andreas Waag

Journal title: Microsystems & Nanoengineering

Journal number: 7

Journal publisher: Springer Nature

Published year: 2021

DOI identifier: 10.1038/s41378-021-00257-y

ISSN: 2055-7434